New Trend in Particle Deposition, PD Process and Its Future
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چکیده
منابع مشابه
Sustainable production and future trend
Over the last 50 years the world’s population and industrialization have soared leading to increased resource use, pollution and waste, and in turn to problems including raw materials shortage and unsustainable increases in landfill areas environmental, social and economic expectation stakeholders of the company every day more and more. Designing products with reuse at end of life in mind is a ...
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Metal Deposition or metallization process is one of the processes in fabricating a wafer. A wafer is a thin slice of semiconductor material, such as a silicon crystal, used in the fabrication of integrated circuits and other micro-devices. Due to the nature on the process, it creates lot of particles, which would impact the next process if it were not removed. Particle deposition on the wafer s...
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This article discusses the mechanisms of particle deposition onto cleanroom surfaces. The main mechanism for particles above about 0.5μm is gravitational settling. Turbulent deposition and electrostatic attraction can also occur at all particle sizes, and for particles below 0.5μm Brownian diffusion is important. Measurements of particle deposition rates (PDRs) were made of particles 10μm on wi...
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ژورنال
عنوان ژورنال: JOURNAL OF THE JAPAN WELDING SOCIETY
سال: 2006
ISSN: 0021-4787,1883-7204
DOI: 10.2207/jjws.75.617